Dual integrated actuators for extended range high speed atomic force microscopy
Applied Physics Letters. 75, 1637-1639 (1999)
T. Sulchek, S.C. Mines, J.D. Adams, D.A. Fletcher, A. Atalar, C.F. Quate, and D.M. Adderton
Dual integrated actuators for extended range high speed atomic force microscopy
Applied Physics Letters. 75, 1637-1639 (1999)
T. Sulchek, S.C. Mines, J.D. Adams, D.A. Fletcher, A. Atalar, C.F. Quate, and D.M. Adderton
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