Micromachined silicon nitride solid immersion lens
JMEMS. 11, 470-478 (2002)
K.B. Crozier, D.A. Fletcher, G.S. Kino, and C.F. Quate
Micromachined silicon nitride solid immersion lens
JMEMS. 11, 470-478 (2002)
K.B. Crozier, D.A. Fletcher, G.S. Kino, and C.F. Quate
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